| 摘要 |
An integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can comprise an edge gripper for gripping a reticle or a carrier box at the edges, and a fork gripper for gripping a reticle or a carrier box at a top and a bottom portions. The integrated grip arm can comprise an edge gripper for gripping a wafer from the edges and an end effector for holding a wafer from the bottom. The integrated grip arm can comprise a vertical gripper for gripping a workpiece from a vertical position and a horizontal gripper for gripping a workpiece from a horizontal position. |
