PIEZOELECTRIC SENSORS AND SENSOR ARRAYS FOR THE MEASUREMENT OF WAVE PARAMETERS IN A FLUID, AND METHOD OF MANUFACTURING THEREFOR

摘要

The present disclosure relates to piezoelectric sensors and piezoelectric sensor arrays, to methods of manufacturing therefor, and to a method of measuring characteristics of a mechanical wave using a piezoelectric sensor array. A piezoelectric sensor is formed of a silicon substrate on which an electrical barrier is added. A patterned bottom electrode layer is added on top of the electrical barrier. A patterned bottom electrode layer is added on top of the electrical barrier. A piezoelectric layer and then a patterned top electrode layer are added on top of the electrical barrier.