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发明名称
摘要
申请公布号
JP5142257(B2)
申请公布日期
2013.02.13
申请号
JP20070250833
申请日期
2007.09.27
申请人
发明人
分类号
H01L21/265
主分类号
H01L21/265
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代理人
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地址
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