| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for processing glass by using a photosensitive resin composition having high etching durability and excellent resolution and stripping property. <P>SOLUTION: The method for processing glass includes: a coating film formation step of forming a coating film of a photosensitive resin composition containing an alkali-soluble resin having a phenolic hydroxyl group on a glass substrate; an exposure step of selectively exposing the coating film; a development step of developing the coating film after exposure to form a resin pattern; an etching step of etching the glass substrate by using the resin pattern as a mask; and a stripping step of stripping the resin pattern. <P>COPYRIGHT: (C)2013,JPO&INPIT |
