| 摘要 |
PURPOSE:To obtain a highly sensitive gas detection element having a stabilized characteristic, by spraying a metallic salt solution of Sn, etc. or its gaseous body mixed with an additional matter of Pt, etc. upon a glass or ceramic substrate heated in an atmosphere containing O2 in the range of specific temperature. CONSTITUTION:For example, a solution added 0.5% Pt to SnCl4 in weight ratio to a solution dissolving 200g SnCl4 in 1l ethyl acetate is sprayed upon a glass substrate heated at 300-800 deg.C in a furnace or atmosphere and plural thin films (about 1mu thickness) 1 of SnOx (x=1-2) are formed. Electrodes 3, 4 are formed on said film 1 by screen printing of Au paste and next, the substrate is separated into each element 1 by a cutter. The element 1 is fixed on a Al2O3 substrate 2 by using silver paste and Pt wires 5, 6 are welded to the electrodes 3, 4. Further, each part 50, 60 of each wire 5, 6 is fixed on the substrate 2 by the silver paste and a gas detection element is accomplished. The film 1 of the element 7 is not defective and the element 7 is excellent is high sensitivity and durability and also, is mass-produced easily. |
