发明名称 RESISTANCE VARIABLE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A variable resistance memory device and a manufacturing method thereof are provided to reduce the number of leakage current paths on a non-selected memory cell by using an upper and a lower electrode having a disconnection part. CONSTITUTION: A substrate having multiple first contacts(21A) and multiple second contacts(21B) is prepared. A line pattern including a first electrode, a resistance part and a second electrode is formed. A first contact hole(H1) which exposes the second contact is formed. An insulating spacer is formed in the side wall of the contact hole. A third contact is formed in the first contact hole having the insulating spacer.
申请公布号 KR20130013977(A) 申请公布日期 2013.02.06
申请号 KR20110075950 申请日期 2011.07.29
申请人 SK HYNIX INC. 发明人 SONG, SEOK PYO;CHUNG, SUNG WOONG;YI, JAE YUN;CHOI, HYE JUNG
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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