发明名称 |
RESISTANCE VARIABLE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A variable resistance memory device and a manufacturing method thereof are provided to reduce the number of leakage current paths on a non-selected memory cell by using an upper and a lower electrode having a disconnection part. CONSTITUTION: A substrate having multiple first contacts(21A) and multiple second contacts(21B) is prepared. A line pattern including a first electrode, a resistance part and a second electrode is formed. A first contact hole(H1) which exposes the second contact is formed. An insulating spacer is formed in the side wall of the contact hole. A third contact is formed in the first contact hole having the insulating spacer. |
申请公布号 |
KR20130013977(A) |
申请公布日期 |
2013.02.06 |
申请号 |
KR20110075950 |
申请日期 |
2011.07.29 |
申请人 |
SK HYNIX INC. |
发明人 |
SONG, SEOK PYO;CHUNG, SUNG WOONG;YI, JAE YUN;CHOI, HYE JUNG |
分类号 |
H01L21/8247;H01L27/115 |
主分类号 |
H01L21/8247 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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