| 摘要 |
<p>PURPOSE: A liquid processing apparatus including a speed controller, a method for controlling the liquid processing apparatus, and a computer readable storage medium are provided to prevent liquid from leaking into a liquid supplying unit. CONSTITUTION: A supplying unit supplies liquid to a substrate held by a substrate holding unit. A supply tube supplies the liquid to a liquid supplying unit(40). A supplying valve(52) is installed in a supplying tube and controls the supply of the liquid. A speed controller(52c) controls the switching speed of the supplying valve. A drain pipe(53) is branched from the supply tube. A first switching valve is installed in the drain pipe. [Reference numerals] (A1,A2,A3,A4) High pressure gas</p> |
