An integrated microfluidic device with actuator

摘要

A microfluidic device has at least one active element (114), e.g. a membrane, which is driven by pneumatic signals consisting in either compressed air or vacuum. At least one electrostatic actuator (112;116) integrated in the microfluidic device controls the operation of the active element (114) by opening or closing the passage which connects the microfluidic device with an external supply of pressure or vacuum. In an alternative embodiment the pneumatic signals may be generated internally using an integrated pump.