FOCUSING POSITION ADJUSTING METHOD, FOCUSING POSITION ADJUSTING APPARATUS, AND LASER PROCESSING APPARATUS

摘要

PURPOSE: A focusing position adjustment method, a focusing position adjustment device thereof and laser processing apparatus thereof are provided to send a laser beam in a street in the state which the focus position is appropriately determined according the height position, by placing accurately a street in a focusing state. CONSTITUTION: A focusing position adjustment method comprises a first focusing position adjustment step which places the target area in the focusing state by adjusting the focusing position the focusing unit based on the distance the maximum contrast position and the one of grid points when the maximum contrast position is specified in a specific process of the maximum contrast position. Multiple camera-pickup images with the change arrangement distance of the focusing unit from a target object for observation are picked up to the camera pick-up unit. The contrast variation of a second light-shield pattern about the arrangement distance of the focusing unit is specified base on the obtained multiple camera pick-up images. A second focusing position adjustment step is selectively performed for the focusing target area to be in the focusing state, wherein the maximum position of contrast change is decided as the arrangement position for the focusing unit in which the focusing target area is in the state of focusing to mate the focusing position of the focusing unit with the maximum position. [Reference numerals] (10) Control unit; (11) Driving control part; (12) Photographing control part; (13) Focusing processing part; (14) Suction control part; (20) Memory unit; (20p) Program; (30) Monitor; (DF) Focusing data; (DP) Focusing position adjustment data