| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing technique of an organic EL element free from contamination of a substrate at pretreatment process, and for forming a precise organic light emitting layer by precisely positioning a mask on the substrate. SOLUTION: The manufacturing method of organic EL element comprises the pretreatment process for the substrate 10, and the pretreatment process comprises a process of heating and cooling the substrate 10 in vacuum. A film formation mask 11 is positioned on the substrate 10 after the cooling process, and a hole transport layer is formed on the substrate 10 through the film forming mask 11, afterwards, at least an organic light emitting layer for one color is formed. The cooling at pretreatment process is carried out in a cooling chamber 24 after heating treatment in a baking chamber 23, and after vacuum plasma treatment in a pretreatment chamber 25. COPYRIGHT: (C)2006,JPO&NCIPI |
