| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a splitting apparatus for a rectangular substrate, capable of attaining power saving and reduction in operation time of a facility. <P>SOLUTION: The apparatus includes a scribing unit A for forming a scribed groove S on a surface of a rectangular substrate W along the width direction of the substrate; a reversing unit B for reversing the scribed rectangular substrate W; a breaking unit C for splitting the reversed rectangular substrate W along the scribed groove S; and a carrying unit 9, 18 for carrying the rectangular substrate W from the scribing unit A to the breaking unit C. The carrying unit is formed so that the rectangular substrate W can be carried while maintaining an attitude in which the length direction of the rectangular substrate W is directed to the carrying direction. A transverse beam 3 holding a scribing head 4 of the scribing unit A is formed along the length direction of the rectangular substrate W. The processing of the scribed groove S along the width direction on the rectangular substrate W is performed by relatively moving either the scribing head 4 or the rectangular substrate W. <P>COPYRIGHT: (C)2013,JPO&INPIT |
