METHOD FOR MANUFACTURING GLASS SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a glass substrate, capable of simply manufacturing the glass substrate with an excellent surface state at high productivity.

SOLUTION: The manufacturing method of the glass substrate comprises: a final polishing step of supplying an abrasive liquid of pH 4.0 or less including polishing abrasive grains on the surface of the glass substrate and polishing the surface of the glass substrate to a specular surface by a polishing pad; a scrubbing and washing step following the final polishing step, of supplying an acid cleaning solution of pH 4.0 or less, and scrubbing and cleaning the surface of the glass substrate by the polishing pad; and a final cleaning step of finally cleaning the glass substrate having been scrubbed and washed.

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