| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an irradiation device capable of simply increasing illuminance. <P>SOLUTION: In the irradiation device which includes a light source device 4 for emitting light, a glass rod 18 constituting an integrator optical system for uniformizing light of the light source device 4 and outputting the uniformized light, and a lens unit 20 that is an optical element for projecting light emitted from the glass rod 18 onto a test object, a close-up lens 81 is provided between the lens unit 20 and the test object. <P>COPYRIGHT: (C)2013,JPO&INPIT |
