| 摘要 |
<p>This charged particle device has a cylindrical lens barrel (102), a charged particle beam optical system that is disposed inside the lens barrel, a sample stage (103) that is disposed on the lens barrel, and support apparatuses (211, 212) that support the lens barrel. The support apparatuses have a simple support structure that simply supports the lens barrel at a plurality of support points established in the axial direction of the lens barrel. The support points of the lens barrel are disposed at positions corresponding to the positions of vibration nodes of the lens barrel. Thus, the lens barrel can be provided with high rigidity and vibrations acting on the lens barrel can be reduced without increasing the weight of the lens barrel itself.</p> |
