Laser ablation for plasma etching endpoint detection,申请号US19900501572-传众专利搜索

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发明名称	Laser ablation for plasma etching endpoint detection
摘要
申请公布号	US4975141(A)	申请公布日期	1990.12.04
申请号	US19900501572	申请日期	1990.03.30
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	GRECO, NANCY A.;NOGAY, JOSEPH P.
分类号	H01L21/302;G01B11/06;H01J37/32;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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