| 发明名称 |
SHIELDING MEMBER HAVING A CHARGE CONTROL ELECTRODE, AND A CHARGED PARTICLE BEAM APPARATUS |
| 摘要 |
A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 &OHgr;cm to about 1012 &OHgr;cm.
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| 申请公布号 |
US2013026385(A1) |
申请公布日期 |
2013.01.31 |
| 申请号 |
US201113196778 |
申请日期 |
2011.08.02 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH;WINKLER DIETER;LANIO STEFAN |
发明人 |
WINKLER DIETER;LANIO STEFAN |
| 分类号 |
H01J3/14;H01S4/00 |
主分类号 |
H01J3/14 |
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