| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the easiness of mounting a connecting member for connecting a supply-side electrode rod with a ground-side electrode rod in a conductive manner. <P>SOLUTION: An antenna structure of a plasma processing apparatus, includes: supply-side electrode rods 51 each connected to a supply side of an AC power supply, and suspended and supported so that its axial center is along a vertical direction in a processing chamber; ground-side electrode rods 52 each connected to a ground side of the AC power supply, and suspended and supported so as to face the supply-side electrode rod 51 in the processing chamber; a coupling member 60 having entry portions 62 allowing tip ends of the supply-side electrode rods 51 and the ground-side electrode rods 52 to enter provided in a main body 61, and suspended in the vicinities of the tip ends of both electrode rods 51 and 52 in a state in which the tip ends of both electrode rods 51 and 52 enter the entry portions 62; and connecting members 53 each having a pair of contact portions 53a disposed inside the entry portions 62 and in contact with the tip ends of both electrode rods 51 and 52, and a connecting portion 53b for connecting the pair of contact portions 53a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
