| 摘要 |
PURPOSE: An OLED manufacturing device including an inspection unit is provided to improve the yield of a panel process by inspecting defects in an OLED manufacturing process using a buffer chamber in real time. CONSTITUTION: A first buffer chamber(102) transfers a substrate inputted through a first chamber to a first transfer chamber(210). A second buffer chamber(300) is connected to the first transfer chamber and receives the substrate from the first chamber. A second chamber is connected to the first buffer chamber and receives the substrate from the first buffer chamber. An inspection unit inspects the substrate in the first buffer chamber. A repair chamber(670) repairs the defective substrate which is determined as the defect by the inspection unit. |
