SCANNING ELECTRON MICROSCOPE AND SCANNING TUNNELING ELECTRON MICROSCOPE

摘要

This scanning tunneling electron microscope comprises an electron lens system with a small lens aberration coefficient to allow three-dimensional observation of 0.1nm atomic sized structures. This scanning tunneling electron microscope further comprises: an aperture whereby an illumination angle may be changed; an illumination electron lens assembly which is capable of changing electron beam probe size and illumination angle; a secondary electron detector (9); a tunneling electron detector (13); a forward scattered electron beam detector (12); a variable focus device (16); an image computation device which identifies image contrast; an image computation device which computes image sharpness; a computation device which carries out a three-dimensional configuration of the image; and a mixer (18) which mixes a secondary electron signal with a specimen forward scattering electron signal.