PRESSURE MEASUREMENT DEVICE HAVING OPTIMIZED SENSITIVITY

摘要

PROBLEM TO BE SOLVED: To provide a MEMS having an optimized sensitivity and/or a MEMS pressure measurement device thereof.

SOLUTION: A pressure measurement device includes: a deformable film 4 which is stretched above a substrate 2 and one surface of the film is configured to receive a pressure to be measured; detection means 6 which is provided with a strain gauge, detects the deformation of the film 4, and is formed on the substrate 2; and a non-deformable arm 14 for transmitting the deformation of the film 4 to the detection means 6 with an amplified form. The arm 14 is hinged to the substrate 2 so as to be rotatable around an axial line Y substantially parallel to a surface of the film 4, and is integrated with the film to transmit the deformation of the film 4 to the detection means 6 with the amplified form.

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