| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for removing a growth substrate of an electromagnetic radiation detection circuit. <P>SOLUTION: In a method for removing a growth substrate of an electromagnetic radiation detection circuit in an infrared or visible range, the detection circuit includes a radiation detection layer made of Hg<SB POS="POST">(1-x)</SB>Cd<SB POS="POST">x</SB>Te obtained by liquid or vapor phase epitaxy or by molecular beam epitaxy, and the detection circuit is hybridized on a read circuit. The method includes the following steps of: subjecting the growth substrate to a mechanical or chemical mechanical polishing step or to a chemical etching step to decrease substrate thickness, up to an interface area between a material of the detection circuit and the growth substrate; and subjecting the interface thus obtained to iodine treatment. <P>COPYRIGHT: (C)2013,JPO&INPIT |
