发明名称 CONDUCTIVE FILM SENSOR AND DETECTION METHOD OF CONDUCTIVE FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a conductive film sensor capable of identifying position and characteristic of a conductive film. <P>SOLUTION: The conductive film sensor includes: a magnetic field radiator 1 that radiates first and second magnetic fields each having different frequency; a storage 401 that stores characteristics of the magnetic field radiator 1 and a first relationship between the position and the characteristics of the conductive film when a first magnetic field is radiated to a conductive film, and the characteristics of the magnetic field radiator 1 and a second relationship between the position and the characteristics of the conductive film when a second magnetic field is radiated; a calculation section 301 that calculates a third relationship between the position and the characteristics of the conductive film on the basis of the characteristics of the magnetic field radiator 1 when the first magnetic field is radiated to a conductive film 2 to be measured and the first relationship, and calculates a fourth relationship between the position and the characteristics of the conductive film on the basis of the characteristics of the magnetic field radiator 1 when the second magnetic field is radiated to the conductive film 2 to be measured and the second relationship; and an identification section 303 that identifies a combination of the position and the characteristics of the conductive film common to the third and fourth relationships. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013015355(A) 申请公布日期 2013.01.24
申请号 JP20110147042 申请日期 2011.07.01
申请人 AZBIL CORP 发明人 OMI TOMOKO
分类号 G01B7/06;G01B7/00;G01N27/72 主分类号 G01B7/06
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