发明名称 |
Method for fabricating cladding layer in top conductor |
摘要 |
A method for cladding two or three sides of a top conductor for a magnetic memory device in ferromagnetic material includes forming a trench with side walls in a coating layer above the memory device. A first ferromagnetic material is deposited along the side walls of the trench. Any ferromagnetic material in a bottom of the trench can be removed. A conductor material is deposited in the trench over the memory device. A second ferromagnetic material is deposited over the conductor material in the trench to form a cladding of the ferromagnetic material around three side of the conductor.
|
申请公布号 |
US6475812(B2) |
申请公布日期 |
2002.11.05 |
申请号 |
US20010802650 |
申请日期 |
2001.03.09 |
申请人 |
HEWLETT PACKARD COMPANY |
发明人 |
NICKEL JANICE H.;ANTHONY THOMAS C. |
分类号 |
G11C11/14;G11C11/15;G11C11/16;H01L21/8246;H01L27/105;H01L27/22;H01L43/08;(IPC1-7):H01L21/00 |
主分类号 |
G11C11/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|