发明名称 Method for fabricating cladding layer in top conductor
摘要 A method for cladding two or three sides of a top conductor for a magnetic memory device in ferromagnetic material includes forming a trench with side walls in a coating layer above the memory device. A first ferromagnetic material is deposited along the side walls of the trench. Any ferromagnetic material in a bottom of the trench can be removed. A conductor material is deposited in the trench over the memory device. A second ferromagnetic material is deposited over the conductor material in the trench to form a cladding of the ferromagnetic material around three side of the conductor.
申请公布号 US6475812(B2) 申请公布日期 2002.11.05
申请号 US20010802650 申请日期 2001.03.09
申请人 HEWLETT PACKARD COMPANY 发明人 NICKEL JANICE H.;ANTHONY THOMAS C.
分类号 G11C11/14;G11C11/15;G11C11/16;H01L21/8246;H01L27/105;H01L27/22;H01L43/08;(IPC1-7):H01L21/00 主分类号 G11C11/14
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