METHOD OF MANUFACTURING SUBSTRATE FOR LIGHT EMITTING DIODE, SUBSTRATE FOR LIGHT EMITTING DIODE MANUFACTURED BY THE METHOD AND METHOD OF MANUFACTURING LIGHT EMITTING DIODE WITH THE SUBSTRATE

摘要

PURPOSE: A method for manufacturing a substrate for a light emitting diode, a substrate for the light emitting diode manufactured by the method and a method for manufacturing the light emitting diode with the substrate are provided to reduce total reflection by using an upper and a lower concavo-convex part. CONSTITUTION: A nanostructure is coated in the upper surface of a substrate member(s100). The nanostructure is spherical shape. An upper concavo-convex part is formed in the upper surface of the substrate member(s200). The nanostructure is coated in the lower surface of the substrate member(s500). A lower concavo-convex part is formed in the lower surface of the substrate member(s600). [Reference numerals] (AA) Start; (BB) End; (s100) Coating an upper surface of a substrate member as a nano structure; (s200) Forming a concavo-convex part on an upper surface of a substrate member by using a dry etching process; (s300) Forming a buffer layer on a concavo-convex part; (s400) Forming an activation layer, a second semiconductor layer, and a first semiconductor layer on a buffer layer; (s500) Coating the bottom of a substrate member as a nano structure; (s600) Forming a concavo-convex part by using a dry etching process at the bottom of a member structure; (s700) Forming a first pad, a transparent electrode, and a second pad