POLYMERIZABLE ESTER COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS

摘要

PURPOSE: A polymerizable ester compound is provided to be used as a functional material or a material for medicine and agrochemical and to ensure excellent transparency. CONSTITUTION: A polymerizable ester compound is denoted by general formula 1 or 2. A polymer compound has repeat unit of general formula 2a or 2b. The polymer compound further contains one or more kinds of repeat units of general formulas 2A-2D. A resist material contains an organic solvent, an acid generator, and base resin containing the polymer compound. A method for forming a pattern comprises: a step of applying the resist material on a substrate; a step of interposing a photomask and exposing by high energy beam or electron beam; and a step of developing.