APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF

摘要

PURPOSE: An apparatus and method for controlling a chuck, an exposing device and a controlling method thereof are provided to reduce the leveling time of the chuck by previously tuning a parameter of the chuck. CONSTITUTION: A tilt element is detected in a chuck. A chuck tilt is controlled in the tilt element of the chuck(604). A parameter of the chuck is tuned after the chuck tilt is controlled(610). A tuning proce3s is based on the remaining tilt element of the chuck. The leveling is adjusted in the chuck. [Reference numerals] (602) Focus measurement(Z shift direction distance measurement)(1st); (604) Chuck tilt controlling; (606) Focus measurement(Z shift direction distance measurement)(2nd); (608) Is a residual tilt component existed?; (610) Executing parameter tuning based on a residual tilt component; (AA) Start; (BB) No; (CC) Yes; (DD) End