| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromechanical conversion element which has small characteristic change during continuous use, a droplet discharge head including the electromechanical conversion element, and a droplet discharge device including the droplet discharge head. <P>SOLUTION: There is provided the electromechanical conversion element which has a lower electrode, an electromechanical conversion film formed of PZT, and an upper electrode, and the electromechanical conversion film is formed to a predetermined thickness by laminating a plurality of PZT thin films by repeating a precursor film forming process of forming a film of a PZT precursor and a baking process for crystallization. Here, Pb(ave) is 100 to 110at% and a variation rate ΔPb=Pb(ave)-Pb(interface) of Pb on a lamination interface of a plurality of the thin films is not greater than 20%, where Pb/(Zr+Ti) as an average atomic weight of Pb included in the electromechanical conversion film is denoted as Pb(ave), and Pb/(Zr+Ti) as an atomic weight of Pb on the lamination interface is denoted as Pb(interface). <P>COPYRIGHT: (C)2013,JPO&INPIT |
