| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the accuracy of defect detection while suppressing capital investment and avoid occurrence of various problems caused such as by waviness of a glass substrate as much as possible, in a case in which defects on the surface are detected through scanning by defect detection means along the surface of the glass substrate. <P>SOLUTION: When glass substrate 10 is inspected for defects by relatively moving the glass substrate 10 and defect detection means 5 arranged opposite to the surface 10a of the glass substrate 10 and scanning by the defect detection means 5 along the surface 10a of the glass substrate 10, the glass substrate 10 is held in a curvature state in which the surface 10a side becomes concave in a cross-section orthogonal to the relative moving direction. The glass substrate 10 is, for example, in a vertical posture and held in the curvature state by holding the upper side 11 and the lower side 12 with a pair of end holding means 3 and 4, respectively. <P>COPYRIGHT: (C)2013,JPO&INPIT |
