发明名称 |
PLASMA BREAKERS AND METHODS THEREFOR |
摘要 |
A plasma processing system comprising of a plasma source having a source enclosure for generating plasma is provided. The plasma processing system also includes a plasma breaker disposed inside the source enclosure. The plasma breaker has a plurality of trenches wherein at least one of the trenches has a sufficiently high aspect ratio such that materials deposited inside the source enclosure covers a surface of the plasma breaker without being deposited at a bottom of at least one of the trenches for at least a time period (t).
|
申请公布号 |
US2013014898(A1) |
申请公布日期 |
2013.01.17 |
申请号 |
US201113180475 |
申请日期 |
2011.07.11 |
申请人 |
HEGDE HARIHARAKESHAVA SARPANGALA |
发明人 |
HEGDE HARIHARAKESHAVA SARPANGALA |
分类号 |
C23C16/505;C23C16/50;H01L21/3065 |
主分类号 |
C23C16/505 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|