| 发明名称 |
PARTICLE SOURCE AND APPARATUS USING PARTICLE SOURCE |
| 摘要 |
<p>The present disclosure provides a particle source comprising a base having a gently-shaped top, and a tip formed as a tiny protrusion on the top of the base.</p> |
| 申请公布号 |
EP2546862(A1) |
申请公布日期 |
2013.01.16 |
| 申请号 |
EP20120721400 |
申请日期 |
2012.05.04 |
| 申请人 |
38TH RESEARCH INSTITUTE, CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION |
发明人 |
LIU, HUARONG;CHEN, PING |
| 分类号 |
H01J9/02;H01J1/304;H01J35/06;H01J37/073;H01J37/08 |
主分类号 |
H01J9/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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