CHARGED PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus in which a driving part has high stability and reliability by preventing a lubricant applied to a slide portion from being used up before maintenance of the apparatus. SOLUTION: The charged particle beam apparatus has the lubricant applied to the slide portion of a moving member moving in a vacuum chamber, wherein the lubricant satisfies the followings. (1) A cumulative slide time (induction time) for starting decomposition reaction of the lubricant in a depressed state is≥140 hours. (2) Depression (critical surface pressure) which causes decomposition reaction of the lubricant is≥0.5 GPa. COPYRIGHT: (C)2010,JPO&INPIT