The High permeability Porous ceramics for vacuum chuck and method for manufacturing the same,申请号KR20110041691-传众专利搜索

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发明名称	The High permeability Porous ceramics for vacuum chuck and method for manufacturing the same
摘要	PURPOSE: A high air-permeable porous ceramic material for vacuum chuck and a manufacturing method thereof are provided to enhance strength by including small amount of carbon. CONSTITUTION: A high air-permeable porous ceramic material for vacuum chuck(100) comprises silicon carbide particle(SiC), metallic silicon(Si) particle, 1.0-5.0 wt% of boron and 2.0 wt% or less of carbon. The porous ceramic material has micropores(120). The porous ceramic material additionally includes one or more cobalt(Co), iron (Fe), nickel (Ni) and copper (Cu). The porosity of the micropores is changed according to the size of metal silicon and addition amount of pore forming agents. A manufacturing method of high air-permeable porous ceramic material for vacuum chuck comprises the following steps: preparing 14-30 wt% of and 2.0 wt% or less of carbon, 1.0-5.0 wt% or less of boron, residual amount of silicon carbide particle(SiC) and plasticizer; mixing the materials; molding the materials and forming a molded product; and sintering the molded product.
申请公布号	KR101222478(B1)	申请公布日期	2013.01.15
申请号	KR20110041691	申请日期	2011.05.02
申请人		发明人
分类号	C04B35/565;C04B35/622;C04B35/64;C04B38/00	主分类号	C04B35/565
代理机构		代理人
主权项
地址

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