APPARATUS FOR THIN LAYER DEPOSITION AND METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME

摘要

PURPOSE: An organic layer deposition apparatus and a method for manufacturing an organic light emitting display device using the same are provided to reduce the size of shadow formed on a substrate by using a blocking plate between a deposition source nozzle unit and a patterning slit sheet. CONSTITUTION: A loading unit(710) includes a first rack(712), an introduction robot(714), an introduction room(716) and a first inversion room(718). An electrostatic chuck(600) fixes a substrate(500) for deposition. A deposition part(730) includes a vacuum chamber(731) and a thin film deposition assembly(300). A first circulation part(610) moves the electrostatic chuck within the deposition part. An unloader(720) separates the substrate from the electrostatic chuck.