| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrode for an electrostatic lens and the like capable of preventing scattered materials and evaporant and the like from an object irradiated with charged particle beam from adhering to an important part of a lens, and narrowing an interval between the lens and the object. <P>SOLUTION: An electrode 1 used for an electrostatic charged particle beam lens has at least one through hole 4. The through hole 4 includes a first region α having a first opening contour and a second region β having a second opening contour to be positioned upstream of charged particle beam with respect to the first region α. When viewed from a direction of an optic axis 3, the first opening contour is included in the second opening contour. <P>COPYRIGHT: (C)2013,JPO&INPIT |
