| 摘要 |
PURPOSE: A probe station for a multi-sensor is provided to replace a probe chuck of an assembly form including a probe socket when the replacement of the probe chuck is necessary, thereby easily replace the probe chuck. CONSTITUTION: A probe station for a multi-sensor comprises a lower body(20), an upper body(10), a probe chuck(50), a probe elevating unit(30), and a sensor support plate(60). The upper body is closed and opened by being connected to the lower body with a hinge. The probe chuck is fixed so that a probe(52) is extended downwardly. The probe chuck is joined to the upper body so that the probe is exposed to the lower part of the upper body. The probe elevating unit elevates the probe chuck and is installed in the upper body. A sensor seating groove is formed in the lower part of the probe chuck in the lower body when the upper body is closed with respect to the lower body. The sensor supporting plate forms the bottom surface of the sensor seating groove and is installed to be touch to the probe. |
