ADAPTIVE OPTICS FOR COMPENSATING ABERRATIONS IN LIGHT-SUSTAINED PLASMA CELLS
摘要
<p>A system for compensating abberative effects caused by a bulb of a plasma cell includes an illumination source configured to generate illumination; a plasma cell, the plasma cell including a bulb for containing a volume of gas; an ellipse configured to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas; and one or more adaptive optical elements configured to compensate for aberrations produced by one or more optical elements, the one or more adaptive optics elements positioned along an illumination pathway between the illumination source and the plasma cell.</p>
申请公布号
WO2013003289(A1)
申请公布日期
2013.01.03
申请号
WO2012US44053
申请日期
2012.06.25
申请人
KLA-TENCOR CORPORATION;BEZEL, ILYA;SHCHEMELININ, ANATOLY;ZHAO, YANMING;DERSTINE, MATTHEW
发明人
BEZEL, ILYA;SHCHEMELININ, ANATOLY;ZHAO, YANMING;DERSTINE, MATTHEW