| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating film forming method capable of controlling a thickness of a coating film in an outer periphery of a substrate and enlarging an effective region of the substrate. <P>SOLUTION: A coating film forming method of an embodiment includes the steps of: rotating a substrate (S102); supplying a chemical for coating film formation onto a rotating substrate (S104); and supplying a liquid whose temperature is lower than an atmospheric temperature of the substrate from a rear surface side of the substrate to an end part of the substrate while forming a film by supplying the chemical onto the rotating substrate (S106). <P>COPYRIGHT: (C)2013,JPO&INPIT |
