| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment stage device having a built-in direct drive motor which enables such features as high speed, high responsiveness, and high precision. <P>SOLUTION: A rotary wheel 2 is formed into a cylinder shape which is rotatably engaged with and supported in a hollow hole 10 of a fixed wheel 1 via a bearing 3, and is set to be higher than the fixed wheel 1. A plurality of armature coils 5 are arranged on an inner circumferential surface of the hole 10 of the fixed wheel 1 such that they extend perpendicularly to an end face of the fixed wheel in the circumferential direction. A plurality of field magnets 4 are arranged on a mounting face 38 on an outer circumferential surface 48 of the rotary wheel 2 such that they extend perpendicularly to an end face of the rotary wheel 2 so as to face the armature coils 5. A coil wiring board 11 on which lead wires 18 from the armature coils 5 are wired is arranged on an upper end face 53, which is an end face located on a side opposite to the fixed side of the fixed wheel 1, so as to be at a right angle to the armature coils 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
