ULTRASONIC UNIT, ULTRASONIC ENDOSCOPE, AND METHOD FOR MANUFACTURING ULTRASONIC UNIT

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic unit 30 which can be easily manufactured.

SOLUTION: An ultrasonic unit 30 comprises an ultrasonic array 40 composed of a plurality of connected ultrasonic elements 20. The ultrasonic element 20 has a silicon substrate 11, a transmitting/receiving part 60 which has a plurality of ultrasonic cells 10 arranged thereon and is disposed on a first principal surface 20SA of the silicon substrate 11, a flexible lower electrode wiring 42, a lower electrode terminal 52, a flexible upper electrode wiring 41, and an upper electrode terminal 51. A flexible third insulating layer 17 covers the surface of the transmitting/receiving part 60, and also covers the lower electrode wiring 42 and the upper electrode wiring 41 which are bent in a direction of a second principal surface 20SB by bending parts 46 and 47.

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