METHOD OF MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor light emitting device.

SOLUTION: A method of manufacturing a semiconductor light emitting device includes steps of: sequentially growing a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer on a semiconductor growth substrate, to form a light emitting part; forming a support part on the second conductivity type semiconductor layer to be coupled to the light emitting part; separating the semiconductor growth substrate from the light emitting part; and applying an etching gas to the semiconductor growth substrate to remove a residue of the semiconductor layer from a surface of the separated semiconductor growth substrate.

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