Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.
申请公布号
WO2013003235(A2)
申请公布日期
2013.01.03
申请号
WO2012US43828
申请日期
2012.06.22
申请人
APPLIED MATERIALS, INC.;SEREBRYANOV, OLEG;GOLDIN, ALEXANDER