SUBSTRATE SEPARATION DEVICE, LOAD LOCK DEVICE, SUBSTRATE ADHESION DEVICE AND SUBSTRATE SEPARATION METHOD

摘要

A substrate separating method includes: holding, in a predetermined position, a substrate sandwiched between a first holder and a second holder opposed to cach other; and relatively moving the first holder and the second holder while the substrate is held in the predetermined position. In holding the substrate, the substrate may be held in the predetermined position by effecting a pressurizing force or a suction force onto the substrate. Also in holding the substrate, the substrate may be held in contact with one of the first holder and the second holder.