发明名称 Inductors having inductor axis parallel to substrate surface
摘要 Inductors and methods for integrated circuits that result in inductors of a size compatible with integrated circuits, allowing the fabrication of inductors, with or without additional circuitry on a first wafer and the bonding of that wafer to a second wafer without wasting of wafer area. The inductors in the first wafer are comprised of coils formed by conductors at each surface of the first wafer coupled to conductors in holes passing through the first wafer. Various embodiments are disclosed.
申请公布号 US8344478(B2) 申请公布日期 2013.01.01
申请号 US20090605010 申请日期 2009.10.23
申请人 MAXIM INTEGRATED PRODUCTS, INC.;ELLUL JOSEPH P.;TRAN KHANH;GODSHALK EDWARD MARTIN;BERGEMONT ALBERT 发明人 ELLUL JOSEPH P.;TRAN KHANH;GODSHALK EDWARD MARTIN;BERGEMONT ALBERT
分类号 H01L21/768;H01L29/86 主分类号 H01L21/768
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