COMPOSITION AND METHOD FOR ENHANCING POT LIFE OF HYDROGEN PEROXIDE-CONTAINING CMP SLURRIES,申请号IL20080190426-传众专利搜索

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发明名称	COMPOSITION AND METHOD FOR ENHANCING POT LIFE OF HYDROGEN PEROXIDE-CONTAINING CMP SLURRIES
摘要
申请公布号	IL190426(A)	申请公布日期	2012.12.31
申请号	IL20080190426	申请日期	2008.03.25
申请人	CABOT MICROELECTRONICS CORPORATION	发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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