ROLL TO ROLL CDS DEPOSITION METHOD AND SYSTEM

摘要

PURPOSE: A method and system for depositing roll to roll CdS are provided to reduce production costs by using only the minimum solutions for depositing a CdS thin film. CONSTITUTION: A conveyor(310) moves a flexible substrate between an inlet and an outlet for depositing CdS. A wet cleaning unit(340) wet-cleans the flexible substrate on the conveyor before a CdS deposition process. An ATM plasma processing unit(350) dry-cleans the flexible substrate after the wet-cleaning process. A coating unit(360) forms a CdS thin film by continuously coating the flexible substrate with chemical solutions three times or more. A hot air unit(370) flows hot air on the flexible substrate to uniformly form the CdS thin film on the flexible substrate.