发明名称 |
CHARGED PARTICLE BEAM APPARATUS, AND SAMPLE PROCESSING AND OBSERVATION METHOD |
摘要 |
An object of the present invention relates to realizing the processing of a sample by charged particle beams and the monitoring of the processed cross section with a high throughput. It is possible to process an accurate sample without an intended region lost even when the location and the size of the intended region are unknown by: observing a cross-sectional structure being processed by FIBs by using a secondary particle image generated from a sample by the ion beams shaving a cross section; forming at least two cross sections; and processing the sample while the processing and the monitoring of a processed cross section are carried out. |
申请公布号 |
US2012326028(A1) |
申请公布日期 |
2012.12.27 |
申请号 |
US201213601893 |
申请日期 |
2012.08.31 |
申请人 |
MUTO HIROYUKI;OHNISHI TSUYOSHI;SEKIHARA ISAMU |
发明人 |
MUTO HIROYUKI;OHNISHI TSUYOSHI;SEKIHARA ISAMU |
分类号 |
H01J43/00 |
主分类号 |
H01J43/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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