发明名称 COPPER PLATING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a copper plating method that can deposit an even and smooth copper plating film with a preferable mirror gloss even when forming a relatively thin copper plating film. <P>SOLUTION: The copper plating method includes: bringing an object to be plated into contact with a pre-treatment solution containing a bromide ion; and depositing copper by electroplating, using a copper plating solution. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012255217(A) 申请公布日期 2012.12.27
申请号 JP20120184061 申请日期 2012.08.23
申请人 ROHM & HAAS ELECTRONIC MATERIALS LLC 发明人 HAYASHI SHINJIRO;TAKIGUCHI HISANORI
分类号 C25D5/34 主分类号 C25D5/34
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