发明名称 COATING DEVICE AND COATING METHOD
摘要 PURPOSE: A coating device and a coating method for preventing substrates from being polluted are provided to form airstream by a gas jet part not to attach scattered coating solution to a substrate. CONSTITUTION: A coating device comprises a substrate holding part(10), a nozzle, a gas blowing part(13), and a control unit. The substrate holding unit maintains the substrate. The nozzle discharges liquid body on a first surface of the substrate. The gas blowing part sprays gas towards a second surface or an end of the substrate. The control unit discharges the gas to the gas jet part while the liquid is discharged from the nozzle to the substrate. The coating device additionally includes plates(61) formed around the substrate.
申请公布号 KR20120138641(A) 申请公布日期 2012.12.26
申请号 KR20120054081 申请日期 2012.05.22
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 SHIMAI FUTOSHI;SATO AKIHIKO
分类号 B05B15/04;B05B1/02;B05B3/00 主分类号 B05B15/04
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