,申请号JP20080082073-传众专利搜索

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发明名称
摘要
申请公布号	JP5107111(B2)	申请公布日期	2012.12.26
申请号	JP20080082073	申请日期	2008.03.26
申请人		发明人
分类号	H05B3/06;H01L21/02;H01L21/3065;H01L21/31;H05B3/18;H05B3/74	主分类号	H05B3/06
代理机构		代理人
主权项
地址

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