| 摘要 |
PURPOSE: A traveling vacuum robot is provided to deliver driving force required for the robot because the driving force is not penetrated through a wall of a chamber and a sealing is maintained by magnetic force generated in a magnet. CONSTITUTION: A traveling vacuum robot(1) comprises a linearly driving unit(20), a driving base unit(30), a transferring base(40), an arm unit(50), and a hand unit. The linearly driving unit comprises a first rail, a second rail(240), and a driving unit. The first rail is joined vertically to an internal plane of a process chamber. The second rail is arranged in a direction identical to the first rail. The driving unit straightly moves along the second rail. The driving base moves along the second rail when the linearly driving unit operates. A lower magnetic(320) of the driving base is touched to the lower part of a vacuum plate and rotated. The transferring base unit is straight-linearly moved along the first rail and an upper magnetic(420) of the transferring base unit is rotated correspondently to the lower magnetic. Two link members of the arm unit are arranged to be spaced at a predetermined space from the center of the transferring base unit. The hand unit is joined to one end of the arm unit and a substrate supporting unit is formed in the other end of the hand unit.
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